This image shows Karsten Frenner

Karsten Frenner

Dr.

Group leader High Resolution Metrology and Simulation
Institute for Applied Optics

Contact

+49 711 685 66065
+49 711 685 66586

Pfaffenwaldring 9
70569 Stuttgart
Germany
Room: 1.218

  1. 2023

    1. C. M. Bett, K. Frenner, S. Reichelt, and W. Osten, “Towards image-free object detection for autonomous vehicles under harsh environmental conditions,” in Optical Measurement Systems for Industrial Inspection XIII, P. Lehmann, W. Osten, and A. A. G. Jr., Eds., in Optical Measurement Systems for Industrial Inspection XIII, vol. 12618. SPIE, 2023, p. 126181C. doi: 10.1117/12.2675716.
    2. L. Fu, M. Daiber-Huppert, K. Frenner, and W. Osten, “Simulation of realistic speckle fields by using surface integral equation and multi-level fast multipole method,” Optics and Lasers in Engineering, vol. 162, p. 107438, Mar. 2023, doi: 10.1016/j.optlaseng.2022.107438.
    3. C. M. Bett, M. Daiber-Huppert, K. Frenner, and W. Osten, “Time-gated-single-pixel-camera: a promising sensor for robust object detection in adverse weather conditions for autonomously driven vehicles,” in Fifteenth International Conference on Machine Vision (ICMV 2022), W. Osten, D. P. Nikolaev, and J. (Jessica) Zhou, Eds., in Fifteenth International Conference on Machine Vision (ICMV 2022), vol. 12701. SPIE, 2023, p. 1270107. doi: 10.1117/12.2680031.
    4. F. Fischer, K. Frenner, M. Granai, F. Fend, and A. Herkommer, “Data-driven development of sparse multi-spectral sensors for urological tissue differentiation,” Journal of the European Optical Society-Rapid Publications, vol. 19, no. 1, Art. no. 1, 2023, doi: 10.1051/jeos/2023030.
    5. V. Vierhub-Lorenz et al., “Development of a LiDAR system for low visibility conditions,” in Optical Measurement Systems for Industrial Inspection XIII, P. Lehmann, W. Osten, and A. A. G. Jr., Eds., in Optical Measurement Systems for Industrial Inspection XIII, vol. 12618. SPIE, 2023, p. 126181A. doi: 10.1117/12.2673772.
    6. A. Birk, K. Frenner, and W. Osten, “Deep learning based compressed sensing in machine vision: an iterative approach to multi object detection,” in Fifteenth International Conference on Machine Vision (ICMV 2022), W. Osten, D. P. Nikolaev, and J. (Jessica) Zhou, Eds., in Fifteenth International Conference on Machine Vision (ICMV 2022), vol. 12701. SPIE, 2023, p. 1270109. doi: 10.1117/12.2683929.
    7. C. M. Bett, M. Daiber-Huppert, K. Frenner, and W. Osten, “Evaluation of a time-gated-single-pixel-camera as a promising sensor for autonomous vehicles in harsh weather conditions,” Journal of the European Optical Society-Rapid Publications, vol. 19, no. 1, Art. no. 1, 2023, doi: 10.1051/jeos/2023023.
    8. H. Li, L. Fu, K. Frenner, and W. Osten, “Design studies of a far-field plasmonic superlens with an enlarged field of view,” Optical Materials, vol. 138, p. 113688, Apr. 2023, doi: 10.1016/j.optmat.2023.113688.
  2. 2022

    1. F. Fischer, A. Birk, P. Somers, K. Frenner, C. Tarín, and A. Herkommer, “FeaSel-Net: A Recursive Feature Selection Callback in Neural Networks,” Machine Learning and Knowledge Extraction, vol. 4, no. 4, Art. no. 4, 2022, doi: 10.3390/make4040049.
    2. F. Fischer, K. Frenner, and A. M. Herkommer, “Sparse Mid-Infrared Spectra Enable Real-time and In-vivo Applications in Tissue Discrimination,” EPJ Web of Conferences, vol. 266, p. 02004, 2022, doi: 10.1051/epjconf/202226602004.
    3. F. Fischer, A. Birk, K. Frenner, and A. Herkommer, “FeaSel-Net: A Recursive Feature Selection Callback in Neural Networks,” May 2022, doi: 10.36227/techrxiv.19803520.v1.
    4. L. Fu, M. Daiber-Huppert, K. Frenner, and W. Osten, “Simulation of Realistic Speckle Fields by Using Surface Integral Equation and Fast Multipole Method,” SSRN eLibrary, 2022, doi: 10.2139/ssrn.4160509.
  3. 2021

    1. M. L. Gödecke, K. Frenner, and W. Osten, “Model-based characterisation of complex periodic nanostructures by white-light Mueller-matrix Fourier scatterometry,” Light: Advanced Manufacturing, vol. 2, no. 2, Art. no. 2, 2021, doi: 10.37188/lam.2021.018.
  4. 2020

    1. L. Fu, M. Daiber-Huppert, K. Frenner, and W. Osten, “Rigorous speckle simulator for large area rough surfaces using surface integral equations and multilevel fast multipole method,” DGaO Proceedings, 2020.
    2. M. L. Gödecke, K. Frenner, and W. Osten, “White-light Mueller-matrix Fourier scatterometry for the characterization of nanostructures with large parameter spaces,” in Metrology, Inspection, and Process Control for Microlithography XXXIV, O. Adan and J. C. Robinson, Eds., in Metrology, Inspection, and Process Control for Microlithography XXXIV, vol. 11325. SPIE, 2020, p. 113250V. doi: 10.1117/12.2551276.
    3. M. L. Gödecke, C. M. Bett, D. Buchta, K. Frenner, and W. Osten, “Optical sensor design for fast and process-robust position measurements on small diffraction gratings,” Optics and Lasers in Engineering, vol. 134, p. 106267, Nov. 2020, doi: 10.1016/j.optlaseng.2020.106267.
  5. 2019

    1. C. Pruss, K. Frenner, and W. Osten, “NPMM200 – Sub-Nanometer-Positionierung in großen Volumina,” DGaO Proceedings, 2019.
  6. 2018

    1. H. Li, L. Fu, K. Frenner, and W. Osten, “Cascaded DBR plasmonic cavity lens for far-field subwavelength imaging at a visible wavelength,” Optics Express, vol. 26, no. 15, Art. no. 15, Jul. 2018, doi: 10.1364/oe.26.019574.
    2. W. Osten, K. Frenner, G. Pedrini, A. K. Singh, J. Schindler, and M. Takeda, “Shaping the light for the investigation of depth-extended scattering media,” in Quantitative Phase Imaging IV, G. Popescu and Y. Park, Eds., in Quantitative Phase Imaging IV, vol. 10503. SPIE, 2018, p. 1050318. doi: 10.1117/12.2296582.
    3. H. Li, L. Fu, K. Frenner, and W. Osten, “A cascaded plasmonic superlens for far-field imaging with magnification at visible wavelength,” DGaO Proceedings, 2018.
    4. J. Drozella, K. Frenner, and W. Osten, “GPU-accelerated simulation of the superresolution capabilities of dielectric microspheres using the Differential Method,” in Optical Micro- and Nanometrology VII, C. Gorecki, A. K. Asundi, and W. Osten, Eds., in Optical Micro- and Nanometrology VII, vol. 10678. SPIE, 2018, p. 106780N. doi: 10.1117/12.2306435.
    5. H. Li, L. Fu, K. Frenner, and W. Osten, “Cascaded plasmonic superlens for far-field imaging with magnification at visible wavelength,” Optics Express, vol. 26, no. 8, Art. no. 8, Apr. 2018, doi: 10.1364/oe.26.010888.
  7. 2017

    1. H. Li, L. Fu, K. Frenner, and W. Osten, “Nanofabrication results of a novel cascaded plasmonic superlens: lessons learned,” in Modeling Aspects in Optical Metrology VI, B. Bodermann, K. Frenner, and R. M. Silver, Eds., in Modeling Aspects in Optical Metrology VI, vol. 10330. SPIE, 2017, p. 103300Y. doi: 10.1117/12.2275586.
    2. M. L. Gödecke, S. Peterhänsel, D. Buchta, K. Frenner, and W. Osten, “Detection of grating asymmetries by phase-structured illumination,” in Fifth International Conference on Optical and Photonics Engineering, A. K. Asundi, Ed., in Fifth International Conference on Optical and Photonics Engineering, vol. 10449. SPIE, 2017, p. 104490C. doi: 10.1117/12.2269167.
    3. B. Bilski, K. Frenner, and W. Osten, “Effective–CD: a contribution toward the consideration of line edge roughness in the scatterometric critical dimension metrology,” Journal of Micro/Nanolithography, MEMS, and MOEMS, vol. 16, no. 2, Art. no. 2, 2017, doi: 10.1117/1.JMM.16.2.024002.
  8. 2016

    1. S. Peterhänsel, M. L. Gödecke, K. Frenner, and W. Osten, “Phase-structured illumination as a tool to detect nanometer asymmetries,” Journal of Micro/Nanolithography, MEMS, and MOEMS, vol. 15, no. 4, Art. no. 4, 2016, doi: 10.1117/1.JMM.15.4.044005.
    2. L. Fu, K. Frenner, H. Li, and W. Osten, “A silicon superlens with a simple design working at visible wavelengths,” in Optical Micro- and Nanometrology VI, C. Gorecki, A. K. Asundi, and W. Osten, Eds., in Optical Micro- and Nanometrology VI, vol. 9890. SPIE, 2016, p. 98900I. doi: 10.1117/12.2228349.
    3. J. Schindler et al., “Resolving the depth of fluorescent light by structured illumination and shearing interferometry,” in Quantitative Phase Imaging II, G. Popescu and Y. Park, Eds., in Quantitative Phase Imaging II, vol. 9718. SPIE, 2016, p. 97182H. doi: 10.1117/12.2212575.
    4. J. Schindler, P. Schau, N. Brodhag, K. Frenner, and W. Osten, “Retrieving the axial position of fluorescent light emitting spots by shearing interferometry,” Journal of Biomedical Optics, vol. 21, no. 12, Art. no. 12, 2016, doi: 10.1117/1.JBO.21.12.125009.
    5. L. Fu et al., “Depolarization of a randomly distributed plasmonic meander metasurface characterized by Mueller matrix spectroscopic ellipsometry,” Opt. Express, vol. 24, no. 24, Art. no. 24, Nov. 2016, doi: 10.1364/OE.24.028056.
  9. 2015

    1. A. Faridian, V. F. Paz, K. Frenner, G. Pedrini, A. den Boef, and W. Osten, “Phase-sensitive structured illumination to detect nanosized asymmetries in silicon trenches,” Journal of Micro/Nanolithography, MEMS, and MOEMS, vol. 14, no. 2, Art. no. 2, 2015, doi: 10.1117/1.JMM.14.2.021104.
    2. L. Fu, P. Schau, K. Frenner, and W. Osten, “A cascaded plasmonic superlens for near field imaging with magnification,” in Modeling Aspects in Optical Metrology V, B. Bodermann, K. Frenner, and R. M. Silver, Eds., in Modeling Aspects in Optical Metrology V, vol. 9526. SPIE, 2015, p. 95260Z. doi: 10.1117/12.2185702.
    3. S. Peterhänsel, M. L. Gödecke, V. F. Paz, K. Frenner, and W. Osten, “Detection of overlay error in double patterning gratings using phase-structured illumination,” Opt. Express, vol. 23, no. 19, Art. no. 19, Sep. 2015, doi: 10.1364/OE.23.024246.
  10. 2014

    1. M. Jamali, I. Gerhardt, M. Rezai, K. Frenner, H. Fedder, and J. Wrachtrup, “Microscopic diamond solid-immersion-lenses fabricated around single defect centers by focused ion beam milling,” Review of Scientific Instruments, vol. 85, no. 12, Art. no. 12, Dec. 2014, doi: 10.1063/1.4902818.
    2. V. Ferreras Paz, K. Frenner, and W. Osten, “Increasing Scatterometric Sensitivity by Simulation Based Optimization of Structure Design,” in Fringe 2013, W. Osten, Ed., in Fringe 2013. Berlin, Heidelberg: Springer Berlin Heidelberg, 2014, pp. 345--348.
    3. L. Fu, K. Frenner, and W. Osten, “Rigorous speckle simulation using surface integral equations and higher order boundary element method,” Optics Letters, vol. 39, no. 14, Art. no. 14, Jul. 2014, doi: 10.1364/ol.39.004104.
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