3D Surface Metrology

The group of 3D Surface Metrology is dealing with sensors for the assessment of the shape of three-dimensional objects.

The core competencies reach from design of optical systems and the development of specialized signal processing algorithms all the way to questions concerning the automated planning of measurements and the integration of sensors into multi modal and multi scale measurement strategies. For this purpose various commercially available simulation tools are routinely applied for the characterization and optimization of sensor systems. These simulation tools are supplemented by custom build extensions or in house developed simulation tools wherever necessary. All measurement systems and the respective signal processing algorithms are developed within an Open-Source software environment that is being developed at the institute, thereby guaranteeing industry ready prototypes.

The main focus of research activity in the group has been devoted to confocal sensors, white light interferometry, structured illumination techniques as well as to optical coherence tomography for the assessment of the three dimensional structure of biological specimen

Our research focuses:

Understanding 3D Sensors

Simulation and Optimisation of 3D measurement systems and devices for research and industry.

New Sensor concepts

Design and development of new 3D optical sensors and measurement systems.

Engineering

Design, construction and characterization of other non-standard optical measurement systems of different applications (not only 3D).

Software

Own software (itom) to control hardware like cameras, actuators, etc. to automate measurement systems.

List of measurement systems

Current projects

  • DynRef
  • Mobimik
  • NASA/ESA
  • SEE3D
  • Sony

Publications

  1. 2025

    1. C. Ryan, T. Haist, and S. Reichelt, “Holographic detection for fast fringe projection profilometry of deep micro-scale objects,” Optics Express, vol. 33, Art. no. 1, Jan. 2025, doi: 10.1364/oe.549266.

  2. 2021

    1. S. Hartlieb et al., “Highly accurate imaging based position measurement using holographic point replication,” Measurement, vol. 172, p. 108852, Feb. 2021, doi: 10.1016/j.measurement.2020.108852.
    2. S. Hartlieb, M. Ringkowski, T. Haist, O. Sawodny, and W. Osten, “Multi-positional image-based vibration measurement by holographic image replication,” Light: Advanced Manufacturing, vol. 2, Art. no. 4, 2021, doi: 10.37188/lam.2021.032.

  3. 2020

    1. S. Hartlieb et al., “Hochgenaue Kalibrierung eines holografischen Multi-Punkt-Positionsmesssystems,” tm - Technisches Messen / De Gruyter Oldenbourg, vol. 87, Art. no. Heft 7-8, 2020, doi: https://doi.org/10.1515/teme-2019-0153.
    2. R. Hahn et al., “Detailed characterization of a mosaic based hyperspectral snapshot imager,” Optical Engineering, vol. 59, Art. no. 12, Dec. 2020, doi: 10.1117/1.oe.59.12.125102.
    3. F. Guerra, T. Haist, A. Warsewa, S. Hartlieb, W. Osten, and C. Tarin, “Precise building deformation measurement using holographic multipoint replication,” Appl. Opt., vol. 59, Art. no. 9, Mar. 2020, doi: 10.1364/AO.385594.

  4. 2018

    1. K. Körner, W. Osten, T. Boettcher, W. Lyda, and M. Gronle, “Verfahren und Vorrichtung zum Erzeugen von multi- oder hyperspektralem Licht, zur hyperspektralen Bildgebung und/oder zur Distanz- und/oder 2-D oder 3-D Profilmessung eines Objekts mittel Spektrometrie,” Sep. 2018 [Online]. Available: https://depatisnet.dpma.de/DepatisNet/depatisnet?action=bibdat&docid=US000010066997B2&famSearchFromHitlist=1
    2. K. Körner and W. Osten, “Anordnung und Verfahren zur robusten Zweistrahl-Interferometrie mit einer Dreifach-Reflexions-Anordnung,” Sep. 2018 [Online]. Available: https://depatisnet.dpma.de/DepatisNet/depatisnet?action=bibdat&docid=DE102016014802B4&famSearchFromHitlist=1
    3. K. Körner, “Verfahren und Anordnung zur robusten, tiefenscannenden fokussierenden Streifen-Triangulation mit mehreren Wavelets,” Nov. 2018 [Online]. Available: https://depatisnet.dpma.de/DepatisNet/depatisnet?action=bibdat&docid=DE102017004428B4&famSearchFromHitlist=1

  5. 2017

    1. H. Yang, T. Haist, M. Gronle, and W. Osten, “Simulation of microscopic metal surfaces based on measured microgeometry,” TM-TECHNISCHES MESSEN, vol. 84, Art. no. 7–8, Aug. 2017, doi: 10.1515/teme-2017-0019.
    2. K. Körner, C. Pruß, A. Herkommer, W. Osten, and D. Claus, “Method and apparatus for optical absorption measurements,” Sep. 2017 [Online]. Available: https://depatisnet.dpma.de/DepatisNet/depatisnet?action=bibdat&docid=US000009772275B2&famSearchFromHitlist=1
    3. K. Körner and W. Osten, “Verfahren und Anordnung zur robusten One-shot-Interferometrie, insbesondere auch zur optischen Kohärenz-Tomografie nach dem Spatial-domain-Ansatz (SD-OCT),” Aug. 2017 [Online]. Available: https://depatisnet.dpma.de/DepatisNet/depatisnet?action=bibdat&docid=US000009739594B2&famSearchFromHitlist=1
    4. J. Krauter and W. Osten, “Nondestructive surface profiling of hidden MEMS by an infrared low-coherence interferometric microscope,” Surface Topography: Metrology and Properties, vol. 6, Dec. 2017, doi: 10.1088/2051-672X/aaa0a8.
    5. T. Haist, “Verfahren und Vorrichtung zur Überprüfung einer Echtheit eines Gegenstandes,” Apr. 2017
    6. R. Hahn, J. Krauter, K. Körner, M. Gronle, and Wolfgang. Osten, “Single-shot low coherence pointwise measuring interferometer with potential for in-line inspection,” MEASUREMENT SCIENCE AND TECHNOLOGY, vol. 28, Art. no. 2, Feb. 2017, doi: 10.1088/1361-6501/aa52f1.
    7. S. Gharbi, H. Pang, C. Lingel, T. Haist, and W. Osten, “Reduction of chromatic dispersion using multiple carrier frequency patterns in SLM-based microscopy,” APPLIED OPTICS, vol. 56, Art. no. 23, 2017, doi: 10.1364/AO.56.006688.
    8. T. Boettcher, M. Gronle, and W. Osten, “Multi-layer topography measurement using a new hybrid single-shot technique: Chromatic Confocal Coherence Tomography (CCCT),” Opt. Express, vol. 25, Art. no. 9, May 2017, doi: 10.1364/OE.25.010204.

  6. 2016

    1. G. Marc and O. Wolfgang, “Multi-scale referencing and coordinate unification of optical sensors in multi-axis machines,” Advanced Optical Technologies, vol. 5. p. 389––, 2016. doi: 10.1515/aot-2016-0053.
    2. C. Lingel, T. Haist, and W. Osten, “Spatial-light-modulator-based adaptive optical system for the use of multiple phase retrieval methods,” APPLIED OPTICS, vol. 55, Art. no. 36, Dec. 2016, doi: 10.1364/AO.55.010329.
    3. M. Gronle and W. Osten, “View and sensor planning for multi-sensor surface inspection,” Surface Topography: Metrology and Properties, vol. 4, p. 24009, Apr. 2016, doi: 10.1088/2051-672X/4/2/024009.
    4. J. Albero et al., “Wafer-level fabrication of multi-element glass lenses: lens doublet with improved optical performances,” OPTICS LETTERS, vol. 41, Art. no. 1, Jan. 2016, doi: 10.1364/OL.41.000096.

  7. 2015

    1. K. Körner, T. Boettcher, W. Lyda, M. Gronle, and W. Osten, “Vorrichtung und Verfahren zur multi- oder hyperspektraleln Bildgebung und / oder zur Distanz- und / oder 2-D oder 3-D Profilmessung eiens Objekts mittel Spektrometrie,” May 2015
    2. M. Hasler, J. Stahl, T. Haist, and W. Osten, “Object field expansion in spatial light modulator-based phase contrast microscopy,” OPTICAL ENGINEERING, vol. 54, Art. no. 4, Apr. 2015, doi: 10.1117/1.OE.54.4.043107.
    3. T. Haist, A. Peter, and W. Osten, “Holographic projection with field-dependent aberration correction,” OPTICS EXPRESS, vol. 23, Art. no. 5, Mar. 2015, doi: 10.1364/OE.23.005590.
    4. T. Haist and W. Osten, “Holography using pixelated spatial light modulators-part 1: theory and basic considerations,” JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, vol. 14, Art. no. 4, Oct. 2015, doi: 10.1117/1.JMM.14.4.041310.
    5. T. Haist and W. Osten, “Holography using pixelated spatial light modulators-Part 2: applications,” JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, vol. 14, Art. no. 4, Oct. 2015, doi: 10.1117/1.JMM.14.4.041311.
    6. T. Haist, M. Gronle, D. A. Bui, and W. Osten, “Holographic multipoint generation for sensing positions,” TM-TECHNISCHES MESSEN, vol. 82, Art. no. 5, SI, May 2015, doi: 10.1515/teme-2014-0039.
    7. J. Albero et al., “Dense arrays of millimeter-sized glass lenses fabricated at wafer-level,” OPTICS EXPRESS, vol. 23, Art. no. 9, May 2015, doi: 10.1364/OE.23.011702.

  8. 2014

    1. A. Keck et al., “Multisensorisches Messsystem zur dreidimensionalen Inspektion technischer Oberflächen,” tm - Technisches Messen, vol. 81, Art. no. 6, 2014, doi: 10.1515/teme-2014-0402.
    2. T. Haist, C. Lingel, R. Adler, and W. Osten, “Parallelized genetic optimization of spatial light modulator addressing for diffractive applications,” Appl. Opt., vol. 53, Art. no. 7, Mar. 2014, doi: 10.1364/AO.53.001413.
    3. T. Haist, S. Dong, T. Arnold, M. Gronle, and W. Osten, “Multi-image position detection,” Opt. Express, vol. 22, Art. no. 12, Jun. 2014, doi: 10.1364/OE.22.014450.
    4. T. Haist, M. Hasler, W. Osten, and M. Baranek, “Programmable Microscopy,” 2014.
    5. T. Haist, M. Gronle, D. A. Bui, and O. W., “Holografische Mehrpunktgenerierung zur Positionsanalyse,” 2014.
    6. T. Haist, M. Gronle, T. Arnold, and D. A. Bui, “Verbesserung von Positionsbestimmungen mittels holografischer Mehrpunktgenerierung,” 2014.
    7. M. Gronle, W. Lyda, M. Wilke, C. Kohler, and W. Osten, “itom: an open source metrology, automation, and data evaluation software,” Appl. Opt., vol. 53, Art. no. 14, May 2014, doi: 10.1364/AO.53.002974.

  9. 2013

    1. T. Ruppel, S. Dong, F. Rooms, W. Osten, and O. Sawodny, “Feedforward Control of Deformable Membrane Mirrors for Adaptive Optics,” IEEE Transactions on Control Systems Technology, vol. 21, Art. no. 3, 2013, doi: 10.1109/TCST.2012.2186813.
    2. F. Mauch, M. Gronle, W. Lyda, and W. Osten, “Open-source graphics processing unit–accelerated ray tracer for optical simulation,” Optical Engineering, vol. 52, Art. no. 5, May 2013, doi: 10.1117/1.oe.52.5.053004.
    3. C. Lingel, T. Haist, and W. Osten, “Optimizing the diffraction efficiency of SLM-based holography with respect to the fringing field effect,” Appl. Opt., vol. 52, Art. no. 28, Oct. 2013, doi: 10.1364/AO.52.006877.
    4. T. Haist et al., “Multipoint vibrometry with dynamic and static holograms,” Review of Scientific Instruments, vol. 84, Art. no. 12, Dec. 2013, doi: 10.1063/1.4845596.
    5. D. Fleische, K. Körner, W. Lyda, M. Gronle, F. Mauch, and W. Osten, “4.3.1 Herausforderungen und Lösungsansätze für die fertigungsnahe Qualitätskontrolle mittels optischer 3D-Messtechnik,” Tagungsband. pp. 469–473, 2013. [Online]. Available: https://www.ama-science.org/proceedings/details/757

Group leader

This image shows Tobias Haist

Tobias Haist

Dr.

Group leader 3D Surface Metrology

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