Optical Metamaterials for Metrology Applications (OPTIM)
Since Abbe it's well known that the resolution of a microscope is limited by diffraction. Due to this limitation conventional optical methods are hardly applicable for nanostructured surfaces that have become standard in semiconductor industry. [more]
Metamaterials for Optical and Photonic Applications in Space
The proposed polarization scrambler consists of spatially distributed metallic meander structures with random angular orientations. We describe the polarization properties of meander structures or meander stacks with the Mueller matrix. [more]
Development of functional sub-100 nm structures with 3D-Two-Photon-Polymerisation-Technique and optical methods for characterization (DFG)
Design and Fabrication of Near- to Far-Field Transformers by Sub-100 nm Two-Photon-Polymerization (DFG)
Group Leader
Karsten Frenner
Dr.Group leader High Resolution Metrology and Simulation