Optische Metamaterialien in Prozessüberwachungssystemen (OPTIM)
Since Abbe it's well known that the resolution of a microscope is limited by diffraction. Due to this limitation conventional optical methods are hardly applicable for nanostructured surfaces that have become standard in semiconductor industry. [mehr]
Metamaterials for Optical and Photonic Applications in Space
The proposed polarization scrambler consists of spatially distributed metallic meander structures with random angular orientations. We describe the polarization properties of meander structures or meander stacks with the Mueller matrix. [mehr]
Design und Herstellung von Nahfeld-Fernfeld-Transformatoren mittels Sub-100 nm Zwei-Photonen-Polymerisation (DFG)
Entwicklung funktioneller sub-100 nm 3D-Zwei-Photonen-Polymerisationstechnik und optische Charakterisierungsmethoden (DFG)
Gruppenleiter
Karsten Frenner
Dr.Gruppenleiter Hochauflösende Messtechnik und Simulation