Defectoscopy
Measurement of defects on wafers for process controll in the semiconductor industry. [more]
Modelling and Simulation
Rigorous numerical simulation of diffraction effects in periodical structures. [more]
Optical Metamaterials
Development of optical metamaterials in the sub-lambda domain. [more]
Scatterometry
Characterization of periodical structures with dimensions in the sub-lambda domain. [more]
Group Leader
Karsten Frenner
Dr.Group leader High Resolution Metrology and Simulation