This page provides an overview on the research focus of the "High Resolution Metrology and Simulation" group.
Measurement of defects on wafers for process controll in the semiconductor industry. [more]
Rigorous numerical simulation of diffraction effects in periodical structures. [more]
Development of optical metamaterials in the sub-lambda domain. [more]
Characterization of periodical structures with dimensions in the sub-lambda domain. [more]
Group leader High Resolution Metrology and Simulation