Research Focus

This page provides an overview on the research focus of the "High Resolution Metrology and Simulation" group.

defektoskopie

Defectoscopy

Measurement of defects on wafers for process controll in the semiconductor industry. [more]

modellierung_simulation

Modelling and Simulation

Rigorous numerical simulation of diffraction effects in periodical structures. [more]

superlens

Optical Metamaterials

Development of optical metamaterials in the sub-lambda domain. [more]

superlens

Scatterometry

Characterization of periodical structures with dimensions in the sub-lambda domain. [more]

Group Leader

This picture showsKarsten Frenner
Dr.

Karsten Frenner

Group leader High Resolution Metrology and Simulation

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