Defectoscopy
Measurement of defects on wafers for process controll in the semiconductor industry. [more]
Modelling and Simulation
Rigorous numerical simulation of diffraction effects in periodical structures. [more]
Optical Metamaterials
Development of optical metamaterials in the sub-lambda domain. [more]
Scatterometry
Characterization of periodical structures with dimensions in the sub-lambda domain. [more]
Group Leader
![This image shows Karsten Frenner](https://www.ito.uni-stuttgart.de/images/institute/img_mitarbeiter/Frenner.jpg?__scale=w:150,h:150,cx:9,cy:28,cw:162,ch:162)
Karsten Frenner
Dr.Group leader High Resolution Metrology and Simulation